Digital Object Identifier 10.1109/MMM.2009.933592 R adio frequency (RF) microelectromechanical systems (MEMS) switches and varactors, developed in 1996–2002 for lowloss switching/routing circuits and X-band (8–12 GHz) to millimeter-wave (mm-wave) (30–120 GHz) phase shifters, have seen increasing applications in tunable fi lters, tunable antennas, and reconfi gurable matching networks. RF MEMS d...

The need for multiband, multimode band switching at low insertion loss while maintaining excellent linearity in mobile phones is driving the need for RF MEMS-based switches. Since this switching problem gets even more acute as new complex waveforms, such as WiMAX are added to this mix, this article looks at the current state of development in RF MEMS switches and discusses its impact on 3G cell...

This chapter sets out the basics and applications of impedance tuner for microwave and millimeterwave applications. Engineering examples, based on innovative and up-to-date Radio-Frequency MicroElectroMechanical Systems (RF-MEMS) technologies, are used to illustrate theoretical and practical principles. An explicit, comprehensive and efficient design methodology of impedance tuners is furthermo...

− A new type of RF MEMS switch for low voltage actuation, high broadband application and high power capability is presented. Mechanical and electromagnetic simulations of this new RF MEMS switch type are shown and the fabrication process and measurement results are given. The switching element consists of a cantilever which is fixed by a suspension spring to the ground of the coplanar line. The...

RF and wireless applications stems from the view that, because of its flexibility, it can be exploited to overcome the limitations exhibited by integrated RF devices1 and, in doing so, enables circuits with new levels of performance not achievable otherwise. Thus, the ultimate goal in applying RF MEMS is to propagate the device-level benefits all the way up to the system level to attain unprece...

Micromechanical (or “μmechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Receiver architectures are then proposed that best harness the tiny size, zero dc power dissipation, and ultra-high-Q of vibrating μmechanical re...

The role of very low temperature (90-170oC) high density inductively coupled plasma chemical vapor deposition (HDICP CVD) process in RF MEMS switch fabrication is addressed. The results on SiNx layers produced by both HDICP CVD and plasma enhanced CVD (PECVD) are compared in terms of surface roughness, breakdown voltage and RF MEMS switch performance. It is found that HDICP CVD can provide very...

The paper explores the modelling and simulation of a Radio Frequency Micro Electro-Mechanical Systems (RF MEMS) switch with the use of a novel seesaw design providing Double-Pole Double-Throw (DPDT) functionality. This optimises the capabilities of the seesaw design structure for use in mobile communications systems and devices. After researching other available seesaw designs, it was realised ...

This paper reviews the recent progress in MEMS for radio frequency (RF) applications from a device perspective. RF MEMS devices reviewed include switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components. Important device parameters are highlighted, as they have significant contributions to t...

This paper presents the work realized on a new RF MEMS design for micro-switch application. This design relies on the separation between the commutation and actuation electrodes for improving the switch lifetime. The design can reduce electrical charging effects during the actuation by preventing a direct contact with the actuation electrode. The proposed structure is optimized by addressing ke...