In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific str...

This paper investigates temperature compensation methods used for the scale factor and bias of the MEMS gyroscope within the temperature range from 40°C to 60°C. The structure and periphery monitor circuit are introduced. Then the determinant elements of the MEMS gyroscope’s scale factor are analysed and the results indicate that scale factor is directly proportional to drive amplitude and sens...

in this article, the bending and free vibration analysis of functionally graded (fg) nanocomposites timoshenko beam model reinforced by single-walled boron nitride nanotube (swbnnt) using micro-mechanical approach embedded in an elastic medium is studied. the modified coupled stress (mcst) and nonlocal elasticity theories are developed to take into account the size-dependent effect. the mechani...

This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are d...

A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-axis gyroscope and tri-axis accelerometer structures are fabricated on the same single silicon chip, which can differentially detect three axes’ an...

Model order reduction techniques are known to work reliably for finite-element-type simulations of MEMS devices. These techniques can tremendously shorten computational times for transient and harmonic analysis. However, standard model reduction techniques cannot be applied if the equation system incorporates time-varying matrices or parameters that are to be preserved for the reduced model. Ho...

The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearizatio...

Original scientific paper Control Moment Gyroscope is one of the main sources of disturbance affecting the accuracy of attitude control system in the spacecraft. This paper concentrates on analysing and testing the micro-vibrations produced by CMG. To analyse its disturbance features systematically, the mechanical features of flywheel, frame and the entire CMG will be firstly studied, and then ...