A mathematical model is presented for the galvanostatic deposition of Ni(OH)2 films in stagnant Ni(NO,), solutions. The objective is to quantify the anomalous deposition behavior reported previously in which the utilization of the electrochemically generated OW species decreased drastically as the concentration of Ni(N03)2 increased beyond 0.1 M. For example, as the Ni(NO,)2 concentration incre...

Progression of technology nodes in integrated circuit design is only possible if there are sustainable, cost-efficient processes by which these designs can be implemented. As future technologies are increasing device density, shrinking device dimensions, and employing novel structures, semiconductor processing must also advance to effectively and efficiently process these devices. Arguably one ...

We demonstrate the feasibility of semiconductor deposition via the electrochemical reduction of gaseous precursors by the use of an anhydrous proton-conducting membrane, the solid acid CsHSO4, at 165 °C. This membrane electrode assembly was operated within the oxidation of hydrogen on a porous Pt anode and the deposition of Si or Ge under bias at the cathode from chloride-based gaseous precurso...

The corrosion behavior of TiN coated 316L stainless steel in an artificial physiological solution was investigated by means of an electrochemical test. Two different PVD methods were used for film deposition: cathodic arc and reactive magnetron sputtering. The dependence of the corrosion resistance on the main deposition parameters (nitrogen pressure, substrate bias) was analyzed. For a better ...

The electrochemical deposition of polyaniline nanofibers and nanoparticles have been investigated on gold electrodes by cyclic voltammetry and their morphology by high resolution scanning electron microscopy and atomic force microscopy. The type and dimensions of the nanostructures obtained depend on deposition conditions such as monomer concentration, scan rate and electrical potential. We hav...

Growth and electrochemical properties of single-crystalline vanadium pentoxide (V2O5) nanorod arrays were investigated. Vanadium pentoxide nanorod arrays were grown by electrochemical deposition, surface condensation induced by a pH change and sol electrophoretic deposition. Uniformly sized vanadium oxide nanorods with a length of about 10 mm and diameters of 100 or 200 nm were grown over a lar...

We describe a study, using in situ transmission electron microscopy, of the shape and nucleation kinetics of three-dimensional islands formed during the electrochemical deposition of copper. By operating an electrochemical cell within an electron microscope, we obtain real-time images of the formation of copper islands on a gold electrode while simultaneously recording electrochemical data such...

Well-defined monohydride-terminated n-Si(111) electrodes were used to study electrodeposition of Pb and Cu as well as electroless Au deposition on these surfaces. With classical electrochemical methods, in-situ STM, ex-situ AFM, SEM and in-situ SXRD, the initial stages of metal deposition and the epitaxial properties of the metal deposit were investigated. © 2000 Elsevier Science Ltd. All right...

This paper presents an electrically-mediated process for copper metallization of semiconductor interconnect features. Compared to traditional metallization processes, the proposed electrochemical deposition process uses a singlecomponent bath that contains no difficult-to-control organic accelerators and levelers. The feasibility of the process is demonstrated by copper deposition onto sectione...

Epitaxial LiCoO2 (LCO) thin films of different orientations were fabricated by pulsed laser deposition (PLD) in order to model single-crystal behavior during electrochemical reaction. This paper demonstrates that deposition of conductive SrRuO3 between a SrTiO3 (STO) substrate and an LCO film allows (1) epitaxial growth of LCO with orientation determined by STO and (2) electrochemical measureme...