the technique used to control the airflow is based on the electro-hydrodynamic actuator which is also called plasma actuator. this actuator ensures the airflow control thanks to the electric wind created by the electrical corona discharge. this ionic wind is developed at the profile surface tangential to the initial free airflow so that it has a significant effect on the boundary layer flow. th...

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral mode...

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response of the system. The suspended micro-mechanical media sled moves in x-y (±50 μm) using electrostatic actuation. The system design specification requires actuation of an 8x8 mm ma...

In this paper we present control strategies for implementing reconfigurable planar microassmbly using multiple stress-engineered MEMS microrobots (MicroStressBots). A MicroStressBot is an electrostatic microrobot that consists of an untethered scratch drive actuator (USDA) that provides forward motion, and a steering-arm actuator that determines whether the robot moves in straight line or turns...

This study is devoted to providing predictions of the pull-in parameters (pull-in voltage and pull-in displacement) of electro-statically actuated micro-beams based on a continuous model using Genetic Algorithm (GA) technique. A phenomenon in which the actuated electrode comes in direct contact with the fixed electrode due to the electrostatic force is called pull-in instability. Accurate deter...

We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning p...

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in cal...

The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using micr...

A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-t...