— This paper describes IMU (Inertial Measurement Unit) platforms and their main target applications with a special focus on the 10 degrees of freedom (10-DOF) inertial platform iNEMO™, its technical features and performances. The iNEMO™ module is equipped with a 3-axis MEMS accelerometer, a 3-axis MEMS gyroscope, a 3-axis MEMS magnetometer, a pressure sensor and a temperature sensor. Furthermor...

This paper presents a functional architecture, system level design, and preliminary experimental evaluation of a unilateral vestibular prosthesis. The sensing element of the prosthesis is a custom designed one-axis MEMS gyroscope. Similarly to the natural semicircular canal, the microscopic gyroscope senses angular motion of the head and generates voltages proportional to the corresponding angu...

Obtaining a correlation factor is a prerequisite for fusing multiple outputs of a mircoelectromechanical system (MEMS) gyroscope array and evaluating accuracy improvement. In this paper, a mathematical statistics method is established to analyze and obtain the practical correlation factor of a MEMS gyroscope array, which solves the problem of determining the Kalman filter (KF) covariance matrix...

There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature e...

Today, the use of MEMS-based control-based unmanned aerial vehicles is becoming widespread. It important that systems used for control are sensitively. In this study, a wearable MEMS gyroscope-based headband designed remote vehicles. This system provides vibration-free rotation angles motors in direction camera connected to 2-axis robotic pan-tilt based on human-machine interaction. addition, s...

High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuators. A Nickel based 3-DoF micromachined gyroscope comprising 2-DoF drive mode and 1-DoF sense mod...