Micro-electro-mechanical systems or MEMS are used in a variety of today’s technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resona...

In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFG) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning elect...

With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accelerometer is one of the available options. The performances of three of the MEMS accelerometers from different manufacturers are investigated in this...

This paper proposes a general architecture for using evolutionary algorithms to achieve MEMS design synthesis. Functional MEMS devices are designed by combining parameterized basic MEMS building blocks together using Multi-objective Genetic Algorithms (MOGAs) to produce a pareto optimal set of feasible designs. The iterative design synthesis loop is implemented by combining MOGAs with the SUGAR...

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electromechanical systems (MEMS) that can perform real-time distributed control. This capability opens up new territory for flow control research. On the other hand, surface e...

INTRODUCTION Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many micro/nano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a syst...

Multiple attractors and their fractal basins of attraction can lead to the loss global stability integrity Micro Electro Mechanical Systems (MEMS). In this paper, multistability a class electrostatic bilateral capacitive micro-resonator is researched in detail. First, dynamical model established made dimensionless. Second, via perturbating method numerical description attraction, multiple perio...

Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...