Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the microsystems processes. We developed such devices using a single metal layer and silicon micromachining by DRIE. The latter technological step has significant impact on the characteristics of the vacuum components. This pape...

The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing application. A platinum resistor of 52 Ω has been designed and simulated on a 0.3 micron thick SiO2 suspended membrane of size 40 × 40 μm using ANSYS. The SiO2 membrane of size 40 × 40 μm and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100> orientation ...

Traditionally, electrical discharge machining (EDM) or conventional laser tools have been used to manufacture a range of precision medical devices. However, these manufacturing methods cannot be used to achieve the miniature features, precision, surface quality, and yields required for manufacturing microfluidic devices for clinical lab-on-a-chip applications, precision drug-delivery catheters,...

Microneedles are expected to have greater demand in biomedical applications like sensing, electroporation & drug delivery in the future and there is need for development of fabrication process which is simple, economical and productive. Present work discusses about fabrication of PDMS (polydimethylsiloxane) micro needle array electrode for bio-potential signal measurement like EEG by micromachi...

We have developed an integrated circuit for in situ monitoring and characterization of CMOS post-process micromachining. In our demonstration, the circuit provides automated readout of N-well resistors surrounding each of 140 micromachining test structures at up to 14,000 samples per second per device during the post-process silicon etch. We use this circuit to examine the effect of pit size, s...

This article presents design and fabrication methodology of Ku Band (linearly polarized) reconfigurable patch antenna. Both bulk and surface micromaching techniques are implemented on patch to have better RF performances. Reconfigurability is implemented by integrating shunt capacitive switch with microstrip patch antenna. Effect of feed mechanisms and role of micromachining on antenna paramete...

Controlled silicon structures on the micron to nanometer order have received much attention owing to their potential applications in various fields such as electrochemical, optoelectrical, and biological sciences. Although the techniques commonly used in fabricating nano-/microstructured silicon are conventional lithographic techniques using a resist mask with an optical, electron, or X-ray bea...

With the trend towards miniaturization, micromachining becomes more and more important in fabricating micro parts. Investigations have shown that unpredictable tool life and premature tool failure present a serious concern in micromachining. To further develop the process, a systematic study of various types of tool geometry has been carried out. The tool failure modes and the ways in which too...

Even though significant progress has been made in the field of micro production and the development of miniaturized micro production-machines in the last ten years, an explicit consideration of clampingdevices has not taken place. The requirements for clamping technology in the manufacturing of microparts and the manufacturing of macroscale parts are highly different. Special clamping devices f...

Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...