This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...

Experiments were conducted to evaluate a silicon accelerometer as an implantable sound sensor for implantable hearing aids. The main motivation of this study is to find an alternative sound sensor that is implantable inside the body, yet does not suffer from the signal attenuation from the body. The merit of the accelerometer sensor as a sound sensor will be that it will utilize the natural mec...

This paper introduces an optical measurement system for shock wave characteristics. The system works by mountinga metal plate attached to spring mounts against the shock wavefront. This set is sealed and can plot the shock wave pressure diagram by measuring plate's displacement, radiation and changing the reflection of light during shock wave conflict, and converting these optical data to volta...

The demand for high performance multifunctional wearable devices is more and more pushing towards the development of novel low-cost, soft and flexible sensors with high sensitivity. In the present work, we describe the fabrication process and the properties of new polydimethylsiloxane (PDMS) foams loaded with multilayer graphene nanoplatelets (MLGs) for application as high sensitive piezoresist...

The development of sensor pins which can be easily integrated into ball screw drives for preload measurement is described in this paper. The sensor’s base body consists out of a steel pin with a special shaped load region. This complex surface is coated and structured with a sensory thin film system based on a hydrogenated carbon layer. The layer shows an excellent tribological stability combin...

We report the development of a high sensitivity artificial haircell (AHC) sensor that employs high aspect-ratio cilium (up to 700μm tall) made of SU-8 epoxy and silicon piezoresistive strain sensors. In this work, we demonstrate the application of the artificial haircell for underwater flow sensing. For device characterization, we have performed deflection testing, resonant frequency testing, s...

The present paper presents a finite element model and analysis for the interaction between a piezoresistive tactile sensor and biological tissues. The tactile sensor is proposed for use in minimally invasive surgery to deliver tactile information of biological tissues to surgeons. The proposed sensor measures the relative hardness of soft contact objects as well as the contact force. Silicone r...