نتایج جستجو برای: rapid thermal annealing

تعداد نتایج: 537532  

Journal: :Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2016

2014
Mastura Shafinaz Zainal Abidin Tahsin Morshed Hironori Chikita Yuki Kinoshita Shunpei Muta Mohammad Anisuzzaman Jong-Hyeok Park Ryo Matsumura Mohamad Rusop Mahmood Taizoh Sadoh Abdul Manaf Hashim

The effects of annealing temperatures on composition and strain in SixGe1-x, obtained by rapid melting growth of electrodeposited Ge on Si (100) substrate were investigated. Here, a rapid melting process was performed at temperatures of 1000, 1050 and 1100 °C for 1 s. All annealed samples show single crystalline structure in (100) orientation. A significant appearance of Si-Ge vibration mode pe...

1999
B. K. Tay X. Shi E. Liu S. P. Lau L. K. Cheah Z. Sun J. Shi

The stress relief of tetrahedral amorphous carbon (ta-C ) films by post-deposition thermal annealing was investigated. The films were subjected to rapid thermal annealing (RTA) for 2 min and conventional furnace annealing (CFA) for 30 min. In both cases, the films were annealed in vacuum with argon (4×10−2 Torr) at successive higher temperatures ranging from 500 to 800°C. It was found that anne...

In the last decade, Calcium Titanate has been introduced as a bioceramic with acceptable mechanical and biological properties for orthopaedic implant applications. In this study, CaTiO3 nano-structure coating was produced by sol-gel dip-coating route for biomedical applications. Calcium nitrate and titanium isopropoxide were used as a precursor. After coating process, the specimen was subject...

2011
Yong Seob Park Byungyou Hong Sang-Jin Cho Jin-Hyo Boo

Conductive carbon films were prepared at room temperature by unbalanced magnetron sputtering (UBMS) on silicon substrates using argon (Ar) gas, and the effects of post-annealing temperature on the structural, tribological, and electrical properties of carbon films were investigated. Films were annealed at temperatures ranging from 400 °C to 700 °C in increments of 100 °C using a rapid thermal a...

2006
C. Y. Ng J. I. Wong M. Yang T. P. Chen

In this work, the flatband voltage shift of SiO2 embedded with silicon nanocrystal (nc-Si) annealed at different annealing temperature, different annealing time and under different temperature ramping rates are being investigated. The Si-ions are implanted into the SiO2 with very low energy. The instability of the flatband voltage shift is due to fact that there are remaining Si ions in the SiO...

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