Title of thesis: MEMS CONVEYANCE: PIEZOELECTRIC ACTUATOR ARRAYS FOR RECONFIGURABLE RF CIRCUITS Mary Claire Tellers, Master of Science 2015 Thesis directed by: Professor Sarah Bergbreiter Department of Mechanical Engineering An array of piezoelectric cantilevers was designed, fabricated, and characterized for use as a micromanipulation surface in a reconfigurable RF circuit microfactory. The pro...

This paper demonstrates a hafnium zirconium oxide (HZO)-based ferroelectric NEMS unimorph as the fundamental building block for very low-energy capacitive readout in-memory computing. The reported device consists of 250 $\mu$m $\times$ 30 cantilever with 20 nm thick HZO on 1 $SiO_2$.Partial switching in achieves analog programmable control piezoelectric coefficient ($d_{31}$) which serves compu...

An inchworm robotic insect is presented that can displace on a smooth horizontal surface. It consists of a piezoelectric unimorph and two custom-designed limbs. A two-module lumped-parameter model is formulated to assist in the desigdanalysis process. The geometry of deformation is analyzed first by superimposing the unirnorph ’s elastic deformation to a rigid-body rotation around the limb/grou...

We have examined the static and dynamic electromechanical responses of PZT–brass (piezoelectric–nonpiezoelectric) plate unimorphs of various brass/PZT thickness ratios. The study was performed both experimentally and theoretically. The static measurements showed that, given a PZT layer thickness, there exists a brass/PZT thickness ratio that gives the unimorph the highest static displacement un...

The paper presents the assessment of electric output rendered by a unimorph and bimorph piezoelectric harvester, with one two active piezoceramic wafers, using numerical simulations. Expected sinusoidal voltages were obtained in time-dependent study, time step corresponding to eigenfrequency found after conducting an Eigenfrequency study. terminal agree Euler-Bernoulli beam theory distance laye...