A novel supercycled atomic layer deposition (ALD) process which combines thermal ALD process with in situ O2 plasma treatment is presented in this work to deposit ZnO thin films with highly tunable electrical properties. Both O2 plasma time and the number of thermal ALD cycles in a supercycle can be adjusted to achieve fine tuning of film resistivity and carrier concentration up to six orders o...

High-quality m-plane orientated ZnO films have been successfully grown on m-plane sapphire by using radio frequency magnetron sputtering deposition. The introduction of a nanometer-thick, low-temperature-grown ZnO buffer layer effectively eliminates inclusions of other undesirable orientations. The structure characteristics of the ZnO epi-layers were thoroughly studied by synchrotron X-ray scat...

Title of Document: PLD GROWTH OF HIGH QUALITY ZINC OXIDE THIN FILMS ON SI SUBSTRATES AND DEVICE DEVELOPMENT. Saeed Esmaili Sardari, PhD , 2012 Directed By: Professor Agis. A. Iliadis Department of Electrical and Computer Engineering and Computer Growth of high quality zinc oxide thin films on silicon substrates is particularly important because it combines the unique features of zinc oxide (ZnO...

ZnO nanorods array films were coated on a glass template through a two-step chemical process. First, a sol-gel spin coating method was used to produce a ZnO seed layer and after that, the ZnO nanorods arrays were grown on it through a low temperature aqueous method. Synthesized films were studied by scanning electron microscope (SEM) and X-ray diffractometer (XRD). X-ray diffraction results sho...

Zinc oxide(ZnO) is a promising material in nanotechnology applications, for example in nano-electronics and nanorobotic technology. The objectives foe our work are to study the effect of thickness on the structural, optical, electrical and mechanical properties and various susbstrates have been investigated of ZnO thin films. ZnO thin films were coated using chemical bath technique for various ...

This study introduces optical properties of a columnar structured zinc oxide [ZnO] antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which we...

For effectively fabricating nanocrystalline ZnO thin films by the sol-gel method, the relationships between the temperature of the heat treatment and the quality of the ZnO thin films was observed. The decomposition of the sol was analyzed by TG-DTA. The orientation of the c-axis of the ZnO thin film was identified by XRD. The morphology was observed and estimated by SEM. The experimental resul...

The energetic particles bombardment can produce large internal stress in the zinc oxide (ZnO) thin film, and it can be used to intentionally modify the surface characteristics of ZnO films. In this article, we observed that the internal stress increased from -1.62 GPa to -0.33 GPa, and the naturally wettability of the textured ZnO nanostructured films changed from hydrophobicity to hydrophilici...

Remarkable surface wettability transition occurs with an inducement of ultraviolet (UV) for aligned ZnO nanorod films. The inorganic oxide films, which show super-hydrophobicity (left), become super-hydrophilic (right) when exposed to UV illumination. After the films are placed in the dark, the wettability evolves back to super-hydrophobicity. This reversible effect is ascribed to the cooperati...

Room-temperature ultraviolet (UV) luminescence was investigated for the atomic layer deposited ZnO films grown on silicon nanopillars (Si-NPs) fabricated by self-masking dry etching in hydrogen-containing plasma. For films deposited at 200 °C, an intensive UV emission corresponding to free-exciton recombination (~3.31 eV) was observed with a nearly complete suppression of the defect-associated ...