We present a micromachined, stress-induced, thermal bimorph actuator for optical purpose. Piston motions of more than 3um are demonstrated by FEM simulation. Upon the release from the substrate, the actuators lift off the substrate due to a large built-in bending moment arising from the compressive residual stress in the poly-silicon layer and tensile residual stress in the metal layer. Large d...

This article describes the use of a charge amplifier to improve the linearity of a piezoelectric bender. Existing charge drive circuits can not be directly applied to bimorph piezoelectric benders since they share a common electrode. In this article a new charge drive circuit and electrical configuration is described that allows piezoelectric bimorphs to be linearised with charge. Experimental ...