The cracks alter the physical and modal properties of beam, i.e., stiffness, damping, natural frequency, mode shapes, and, in turn, dynamic response beam changes to a considerable extent. condition monitoring beams is essential avoid its catastrophic failure applications. A basic criterion has been followed for parameters like frequencies, stiffness possible crack detection. In contrast, dampin...

Title of dissertation: PIEZOELECTRIC MICROBEAM RESONATORS BASED ON EPITAXIAL Al0.3Ga0.7As FILMS Lihua Li, Doctor of Philosophy, 2005 Dissertation directed by: Professor Don DeVoe Department of Mechanical Engineering In this work, piezoelectric resonators based on single crystal Al0.3Ga0.7As films are implemented. The combination of Si doped Al0.3Ga0.7As as electrode layers and moderate piezoele...

A cantilevered bimorph-based resonance-mode scanner for high speed atomic force microscope (AFM) imaging is presented. The free end of the bimorph is used for mounting a sample stage and the other one of that is fixed on the top of a conventional single tube scanner. High speed scanning is realized with the bimorph-based scanner vibrating at resonant frequency driven by a sine wave voltage appl...

Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to...

In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about 2 volt and the size of the switch is 110×60μm, that in compared with other electrostatic cantilever be...