نتایج جستجو برای: chemical vapour deposition
تعداد نتایج: 460703 فیلتر نتایج به سال:
Journal:
Iranian Journal of Materials Science and Engineering
2019
Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...
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:Nanoscale
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:Journal of the Society of Powder Technology, Japan
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