Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variant...

System Dynamics and Adaptive Control for MEMS Gyroscope Sensor Juntao Fei1,2 and Hongfei Ding2 1Jiangsu Key Laboratory of Power Transmission and Distribution Equipment Technology 2College of Computer and Information, Hohai University, Changzhou, 213022, P. R. China Abstract: This paper presents an adaptive control approach for Micro‐Electro‐Mechanical Systems (MEMS) z‐axis gyroscope sensor....

Micro Electro-Mechanical Systems (MEMS) have been developed for years and find a wide range of applications. Nevertheless, there is still a lack of efficient collaboration between expert teams involved in MEMS design to enable an efficient multidisciplinary approach. Furthermore, the shrinking of the systems’ size and their growing integration level require to design HW and SW subsystems in a m...

Cost and space constraints are currently driving manufacturers of Mobile Mapping Systems (MMS) and location based services to investigate and develop next generation of low cost and small size navigation systems to meet the fast growing mobile mapping and location services market demands. Advances in Micro-Electro-Mechanical Systems (MEMS) technology have shown promising light towards the devel...

This tutorial is the first presented by the authors of Smart MEMS and Sensor Systems (2006, Imperial College Press). The aim of the tutorial is to present the directions of research, development and technological evolution for Electro Mechanical Microsystems, and in particular microsensors. The development of MEMS devices has generally followed a bottom up methodology, reaching now a stage wher...

Determining the interfacial adhesion of ultrathin functional films in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) becomes increasingly crucial for optimal design of MEMS/NEMS devices. However, direct measurement of adhesion properties of ultrathin films can be challenging, as the traditional metrology of adhesion at macroscopic scales becomes unsuitable in...

Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. However, high friction in these systems is a problem which limits the development of MEMS devices in which sliding contacts are involved. The aim of this research is to evaluate the effect of boundary slip on the hydrodynamic friction in a low load lubricated MEMS, in particu...

The mechanical testing of micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) requires precise measurements of displacement and strain in the nanometer scale. Integrated testing devices, including specimens, actuators and sensors, were designed and fabricated to overcome the aligning and gripping difficulties faced by previous separated micromechanical testing app...

This paper proposes a general architecture for using evolutionary algorithms to achieve MEMS design synthesis. Functional MEMS devices are designed by combining parameterized basic MEMS building blocks together using Multi-objective Genetic Algorithms (MOGAs) to produce a pareto optimal set of feasible designs. The iterative design synthesis loop is implemented by combining MOGAs with the SUGAR...

Micro-electro-mechanical systems or MEMS are used in a variety of today’s technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resona...