Although Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of research, many MEMS designers still rely on backof-the-envelope calculations due to a lack of efficient computer-aided design (CAD) tools that can assist with the initial stages of design exploration. This paper introduces case-based reasoning (CBR) techniques to the design of MEM...

We simulate the dynamic and temperature depen dent behavior of two di erent Micro Electro Mechanical Systems MEMS by utilizing recently developed par allel codes which enable a coupling of length scales The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale by combining the power of an atomistic simulation with th...

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to development of small-scale smart sensing devices improved sensitivity a lower cost fabrication and relatively small power consumption. This article aims provide overview recent work carried out on methodologies adopted dev...

Multiple attractors and their fractal basins of attraction can lead to the loss global stability integrity Micro Electro Mechanical Systems (MEMS). In this paper, multistability a class electrostatic bilateral capacitive micro-resonator is researched in detail. First, dynamical model established made dimensionless. Second, via perturbating method numerical description attraction, multiple perio...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in ...

Electro-osmosis is the flow produced by the action of an electric field on a fluid with a net charge, which is created by the Zeta potential and confined in the Debye layer. This basic phenomenon in the electro-kinetic transport plays an important role in the microfluidic systems being explored today because it can be applied to a variety of MEMS devices. This paper presents global and point-wi...

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effec...

An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at...

This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important sectio...