The use of electrostatic forces to provide actuation is a method of central importance in microelectromechanical systems (MEMS) and is of growing importance in nanoelectromechanical systems (NEMS). The study of electrostatic actuation has led to numerous interesting experimental, theoretical, and numerical results. Yet, surprisingly, even simple electrostatically actuated systems have secrets t...

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...

There have been growing interests in direct patterning of metallic contents on the surface of the substrate without including complex steps of the micro fabrication lithography process. The direct fabrication process using ink-jet printing can be expected to be a powerful tool for both nanotechnology research and applications such as micro electronics. Inkjet printers operate by propelling vari...

In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are ...

In this paper, atomic layer deposited (ALD) alumina (Al2O3) has been demonstrated as the structural material for a micro-resonator for the first time. An electrostatically actuated micro-bridge made of chromium (Cr) coated ALD Al2O3 was used as a resonator. The resonator was formed by simple wetand dry-etching processes. The static displacement profile of the micro-resonator under electrostatic...

We demonstrate electrostatically actuated end-coupled optical waveguide devices in the indium phosphide (InP) material system. The design of a suitable layer structure and fabrication process for actuated InP-based waveguide micro-electro-mechanical systems (MEMS) is reviewed. Critical issues for optical design, such as coupling losses, are discussed and their effect on device performance is ev...

In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literatures. This article; for the first time; presents an analytical study on the stiffness variation of m...

This paper presents the advantages of a strong coupled formulation to model the electro-mechanical coupling appearing in MEMS. The classical modeling approach is to use a staggered methodology iterating between two different programs to obtain the solution of the coupled problem. In this research a strong coupled formulation is proposed and a tangent stiffness matrix of the whole problem is com...