Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a...

Perhaps the most widely known nonlinear phenomena in nanoand microelectromechanical systems is the “pull-in” or “jump-to-contact” instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state configuration of the device where mechanical members remain separate. This instability affects the design of many devices. It may...

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was ...

This paper presents analytic derivation of dynamic behavior of a liniearized micro-electro-mechanical resonator. The parametric oscillation results from a displacement-dependent electrostatic force generated by oscillation of a microbeam. The utilized device is a MEMS with a time-varying capacitor. The stability and steady state dynamic behavior of the MEMS has been analyzed without polarizatio...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

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This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electros...

the present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step dc voltage while the fringing-field effect is taken into account in the vibrational equation of motion. by employing modern asymptotic approach namely homotopy perturbation method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the infl...