When self-sputtering is driven far above the runaway threshold voltage, energetic electrons are made available to produce "excess plasma" far from the magnetron target. Ionization balance considerations show that the secondary electrons deliver the necessary energy to the "remote" zone. Thereby, such a system can be an extraordinarily prolific generator of usable metal ions. Contrary to other k...

Konstantinos D. Bakoglidis, Susann Schmidt, Magnus Garbrecht, Ivan G. Ivanov, Jens Jensen, Grzegorz Greczynski and Lars Hultman, Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering, Journal of Vacuum Science & Technology. A, 2015, 33(5), 05E112 . http://dx.doi.org/10.1116/1.492327...

Nb/Cu superconducting superlattices have been fabricated by dc magnetron sputtering. This system shows a vortex glass transition with critical exponents similar to high temperatures super-conductors exponents. The transition dymensionality is governed by the superconducting coupling regime. The vortex glass transition shows a pure two dimensional behavior in decoupled superlat-tices and a quasi...

The growth of Eu-doped GaN (GaN:Eu) films has been performed on GaAs (100) substrates using RF magnetron sputtering method. The GaN layers exhibit a wurtzite structure. Substrate temperature and the pressure during the deposition do not influence the orientation of GaN:Eu films. After annealing of GaN films in NH3, a strong red luminescence at 622 nm due to Eu ions has been observed.

This contribution reviews plasma polymer nanoparticles produced by gas aggregation cluster sources either via plasma polymerization of volatile monomers or via radio frequency (RF) magnetron sputtering of conventional polymers. The formation of hydrocarbon, fluorocarbon, silicon- and nitrogen-containing plasma polymer nanoparticles as well as core@shell nanoparticles based on plasma polymers is...

Articles you may be interested in Room temperature deposition of alumina-doped zinc oxide on flexible substrates by direct pulsed laser recrystallization Appl. Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methodsa) Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnet...

A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourie...

Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation comb-like current waveforms due to splitting pulsing were observed with decrease pressure. This observation corresponds evolution from MPPMS condition deep-oscillation-magnetron-sputtering (DOMS)-like b...

INTRODUCTION The Cu polyester thin-sputtered layers on textile fabrics show an acceptable bacterial inactivation kinetics using sputtering methods. MATERIALS AND METHODS Direct current magnetron sputtering (DCMS) for 40 s of Cu on cotton inactivated Escherichia coli within 30 min under visible light and within 120 min in the dark. For a longer DCMS time of 180 s, the Cu content was 0.294% w/w...

Due to the direct conversion between thermal and electrical energy, thermoelectric materials their devices exhibit great potential for power generation refrigeration. With rapid development of personal wearable electronics, design flexible inorganic receives increasing attention. As one most mature thin-film fabrication techniques, magnetron sputtering plays a key role in thin films devices, bu...