Measurements are reported on the mechanical properties of high-aspect-ratio micromechanical structures formed using a conventional 0.5-μm CMOS process. Composite structures are etched out of the CMOS dielectric, aluminum, and gate-polysilicon thin films using a post-CMOS CHF3:O2 reactive-ion etch and followed by a SF6:O2 silicon etch for release. Microstructures have a height of 5 μm and beam w...

The Wigner-Araki-Yanase (WAY) theorem states a remarkable limitation to quantum mechanical measurements in the presence of additive conserved quantities. Discovered by Wigner in 1952, this limitation is known to induce constraints on the control of individual quantum systems in the context of information processing. It is therefore important to understand the precise conditions and scope of the...

The standard quantum limit constrains the precision of an oscillator position measurement. It arises from a balance between the imprecision and the quantum backaction of the measurement. However, a measurement of only a single quadrature of the oscillator can evade the backaction and be made with arbitrary precision. Here we demonstrate quantum backaction evading measurements of a collective qu...

Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to...

Two inspiratory times (0.5 and 1.0 seconds) were compared when weaning infants from mechanical ventilation. The shorter inspiratory time was associated with significant increases in minute volume and reduction in active expiration.