A single crystal silicon MEMS microactuator for high density hard disk drives is described in this paper. The microactuator is located between a slider and a suspension, and drives the slider on which a magnetic head is attached. The MEMS actuator is fabricated by improved LISA process. It has an electrically isolated 20:1 (40μm thick, 2μm width) high aspect ratio structure directly processed f...

The annelid provides a biological solution of effective locomotion adaptable to a large variety of unstructured environmental conditions. The undulated locomotion of the segmented body in the annelid is characterized by the combination of individual motion of the muscles distributed along the body, which has been of keen interest in biomimetic investigation. In this paper, we present an annelid...

A voltage regulator is developed to extend the operation range of a electrostatic actuator using a displacement feedback. The feedback actuator system can be used for continuous position tracking of step, ramp, or harmonic voltage signals. The electrostatic actuator is composed of a micro-cantilever beam electrode above a fixed electrode. The voltage difference between the two electrodes is reg...

Localization of a needle tip is important for biopsy examinations in clinics. However, the needle tip is sometimes difficult to discern under the guidance of sonography due to its poor visibility. A mini actuator that radiates a low-intensity ultrasound wave was manufactured using micro-electro-mechanical system (MEMS) technology. Interference between the radiated and diagnostic ultrasound puls...

This paper presents an interactive tactile graphical display, for the visually impaired information technology access applications. The display consists of a matrix of dots. Each dot is an electro rheological micro actuator. The actuator design and development process is presented in this paper. Prototype size 124x4 dots was manufactured. An advanced software tools and embedded system based on ...

A modified Prandtl-Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describ...

Arrays of electrostatic MEMS actuators have been fabricated using a modiied, multi-layer SCREAM (Single-Crystal Reactive Etching and Metallization) process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon (SCS) tips. They can be used to generate a force eld for the manipulation of small, at objects. Calculations and experiments show tha...