Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blas...

It has been shown that micromachining of polyimide using a mode-locked high repetition rate, 80 MHz, 355nm laser is more efficient than the q-switched laser at same wavelength and same power level in terms of material removal rate. In this study we have explored and characterized the benefits of using high repetition rate, high average power, 355 nm mode-locked and q-switched lasers for microma...

Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silico...

A microrobotic leg actuated with amplifying mechanisms is developed in this letter to mimic the motion of legs natural organisms on small scale. The device has a planar structure and fabricated bulk micromachining. Two electrothermal actuators are used drive back forth workspace. actuator transmitted elastically using flexible arms. mechanism symmetrical similar standard parallel manipulators b...

Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between ...

The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potential...