Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...

Free-vibration-resonance frequencies of a film/substrate layered specimen depend on the dimensions, densities, and elastic constants both of the film and substrate. Then, the elastic constants of thin films are inversely determined by measuring the resonance frequencies and the other parameters. Because contributions of the film elastic constants to the resonance frequencies are small, high acc...

In this work we report on the fabrication process for the development of a flexible piezopolymeric transducer for health monitoring applications, based on lead-free, piezoelectric zinc oxide (ZnO) thin films. All the selected materials are compatible with the space environment and were deposited by the RF magnetron sputtering technique at room temperature, in view of preserving the total flexib...

mn doped zno nanocomposite thin film coated on glass by a simple spin-coating method was used to degrade an azo textile dye from aqueous environment. mn doped zno nanocomposite thin film was characterized by means of x-ray diffraction (xrd) and scanning electron microscopy (sem). the photo-reduction activity of photocatalyst was evaluated using an azo textile dye as organic contaminant irradiat...

A “capacitive-piezo” transducer that combines the strengths of capacitive and piezoelectric mechanisms to achieve an impedance and Q simultaneously lower and higher, respectively, than otherwise attainable by either mechanism separately, has allowed demonstration of a 1.2-GHz contour-mode AlN ring resonator with a motional resistance of 889 Ω and Q=3,073 higher than so far measured for any othe...

This work focuses on constructing a vibrational energy scavenging device with a specific application to MEMS wireless sensor networks. The device utilizes vibrations produced by HVAC ducts, traffic in a room, and even wind hitting a window. The advantages of using thin film (~1 micron) PZT (Pb1.15(Zr0.47, Ti0.53)O3) over a larger scale bimorph will be addressed. The thin films are grown using p...

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...

Abstract Chitin has proven to have a good mechanical and electrical properties be used in making piezoelectric thin films. However, due the restriction solubilizing chitosan many solvents, there is increasing interest exploring of producing Chitosan, compared chitin, can easily solubilized certain dilute acids. Chitosan that been extracted from fungal biomass for fabrication biomaterial There a...

Probing the piezoelectricity and ferroelectricity of thin film devices and nanostructures quantitatively has proven to be challenging because the appropriate experimental tools have had a limited range of usefulness. We show here that the piezoelectric and ferroelectric properties of epitaxial thin films can be measured quantitatively using time-resolved synchrotron x-ray microdiffraction. Micr...