The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearizatio...

A multi-output second generation current conveyor (MOCCII), that can be used to realized first, second and third generations current conveyors, is proposed. The MOCCII consists of a CMOS differential stage for the voltage input, push-pull stage and the improved cascode current mirrors for the current output. Feedback techniques are proposed in order to provide a voltage gain of 0.991, a current...

The paper investigates the actuation mechanism in floating electrode MEMS capacitive switches. It demonstrated that in the pull-in state the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and FowlerNordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt dec...

this article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. the electrostatic actuation was induced by applying ac-dc voltage between the microbeam and electrode plate. in contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. in additio...

A Grating Light Modulator (GLM) based on Micro-Electro-Mechanical Systems (MEMS) is applied in projection display. The operating principle of the GLM is introduced in this paper. The electromechanical characteristic of the passive matrix addressing GLM is studied. It was found that if the spring constant is larger, both the response frequency and the driving voltage are larger. Theoretical anal...

The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 pN at 40V clamping voltage and 25 V actuator ...

This paper deals with the effect of the intrinsic material length-scale parameter on the stability and natural frequency of a rectangular micro-plate for two different cases; fully clamped and fully simply supported. A variational formulation based on Hamilton’s principle and the modified couple stress theory is used to obtain the nonlinear governing equation of a micro-plate incorporating the ...

This paper reports the design, fabrication, packaging, and testing of a relay-type threshold accelerometer array. The array includes 15 different sense elements ranging from 10 to 150 g in 10 g increments, and triply redundant 20 and 100 g sense elements for a total of 19 elements. The devices were fabricated using a modified sacrificial LIGA technique that creates a 100–300 m thick nickel stru...

A non-linear analysis of nanotube based nano-electromechanical systems (NEMS) is presented. Singly and doubly clamped nanotubes under electrostatic actuation are examined by solving nonlinear elastic equations. The analysis emphasizes the importance of nonlinear effects, such as finite kinematics (i.e. large deformations) and charge concentrations at the tip of singly clamped nanotubes, in the ...

In this paper a nonlinear analysis of nanotube based nano-electromechanical systems is reported. Assuming continuum mechanics, the complete nonlinear equation of the elastic line of the nanotube is derived and then numerically solved. In particular, we study singly and doubly clamped nanotubes under electrostatic actuation. The analysis emphasizes the importance of nonlinear kinematics effects ...