This research systematically investigates the fluid damping for micromachined beam-type resonators with high resonant frequencies. The work s aimed to find a general fluid damping law which can quantitatively be used as a design tool for the resonance-based micro sensors by accurately redicting the quality factor for resonators operated in air or liquid. Micro-cantilevers with different dimensi...

We propose a quantum processor for the scalable quantum computation on microwave photons in distant one-dimensional superconducting resonators. It is composed of a common resonator R acting as a quantum bus and some distant resonators rj coupled to the bus in different positions assisted by superconducting quantum interferometer devices (SQUID), different from previous processors. R is coupled ...

This paper presents the modeling, design, fabrication and measurement of MEMS-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Qu). Integrated electrostatically-actuated thin diaphragms are used for the first time for tuning the frequency of the resonators/filters. An example tunable resonator with 2.6:1 (5.0 − 1...

The propagation loss in compact silicon microring resonators is optimized with varied ring widths as well as bending radii. At the telecom band of 1.53-1.57 mum, we demonstrate as low as 3-4 dB/cm propagation losses in compact silicon microring resonators with a small bending radius of 5 mum, corresponding to a high intrinsic quality factor of 200,000-300,000. The loss is reduced to 2-3 dB/cm f...

The low quality factor (Q) of single-walled carbon nanotube (SWNT) resonators has limited their sensitivity in sensing application. To this end, we employ the technique of parametric amplification by modulating the spring constant of SWNT resonators at twice the resonant frequency and achieve 10 times Q enhancement. The highest Q obtained at room temperature is around 700, which is 3–4 times be...

Following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS), nanomechanical resonators with increasingly high quality factors are possible. Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. Here we present an integrated NEMS transducer based on a microwave cavity dielectr...

This paper presents the findings of a design, modeling, and fabrication study of ZnO and PbZr0 3Ti0 7O3 thin-film bulk acoustic resonators and filters. Measurements of the high-frequency responses of ZnO resonators having different area are used to develop an acoustic model that accurately represents resonator impedance data. The models are also used to interpret -parameter measurements on thin...

An accurate macro model for free-molecule squeeze-film air damping on micro plate resonators is present. This model relates air damping directly with device dimensions and operation parameters and therefore provides an efficient tool for the design of high-performance micro resonators. The construction of the macro model is based on Molecular Dynamics (MD) simulations and analytical traveling-t...

The quantum behaviour of mechanical resonators is a new and emerging field driven by recent experiments reaching the quantum ground state. The high frequency, small mass, and large quality-factor of carbon nanotube resonators make them attractive for quantum nanomechanical applications. A common element in experiments achieving the resonator ground state is a second quantum system, such as cohe...

EPR resonators on the basis of standing-wave cavities are optimised for large samples. For small samples it is possible to design different resonators that have much better power handling properties and higher sensitivity. Other parameters being equal, the sensitivity of the resonator can be increased by minimising its size and thus increasing the filling factor. Like in NMR, it is possible to ...