Selective etching of SiO2 over polycrystalline silicon has been studied using CHF3 in an inductively coupled plasma reactor ~ICP!. Inductive powers between 200 and 1400 W, as well as pressures of 6, 10, and 20 mTorr were used in this study of the etch rate and selectivity behaviors for silicon dioxide, silicon, and passively deposited fluorocarbon films. Using in situ ellipsometry, the etch rat...

Physicians are aware of the benefits of calcium and vitamin D supplementation. However, additional nutritional components may also be important for bone health. There is a growing body of the scientific literature which recognizes that silicon plays an essential role in bone formation and maintenance. Silicon improves bone matrix quality and facilitates bone mineralization. Increased intake of ...

This study attempts to model correctly the process dependence of thermal SiO2 film physical structures and their associated densities, as well as high frequency dielectric constants, so as to provide a foundation for a ULSI process-dependent device reliability simulator. By exploring the characteristic signature of ellipsometric data reduced using a one-layer film model, and comparing it to a t...

We describe waveguides of photoluminescent silicon-rich silicon dioxide, which have been patterned by triangular two-dimensional ~2D! photonic crystals to give higher-order photonic bandgaps occurring within the luminescence band of the core material. Photonic crystal modification of the photoluminescence spectrum allows identification of angle-tuned photonic bandgaps, in close agreement with 2...

Free silica (silicon dioxide) is naturally found in amorphous and crystalline forms in many rocks in the Earth . Inhaled silicon dioxide is usually crystalline and most often quartz which is the most important form. Silicosis is an irreversible disease that results from workrelated exposures to dusts containing silica crystals, and is characterized by fibrotic tissue reaction caused by the pres...