Electrodeposited multilayers of NiCu/Cu and NiFeCu/Cu were examined for nanoimprinting applications. Layer sizes on the order of 100 nm were deposited and the copper layer etched. Current efficiency and layer composition of electrolytes having different pH values were examined utilizing a rotating disk electrode. Due to large grain growth in the NiCu/Cu system, the bilayers resulted in a macros...

10 Abstract 11 Electrodeposited multilayers of NiCu/Cu and NiFeCu/Cu were examined for nanoimprinting applications. Layer 12 sizes on the order of 100 nm were deposited and the copper layer etched. Current efficiency and layer composition of 13 electrolytes having different pH values were examined utilizing a rotating disk electrode. Due to large grain growth 14 in the NiCu/Cu system, the bilay...