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This paper reports a bimorph piezoelectric vibration energy harvester incorporating multiple PZT layers. The advantage of a multi-layer generator is that it produces a higher power than a single-layer generator having the same total thickness. In addition, a lower voltage is required to polarize a multi-layer generator reducing the risk of breakdown during polarization. Moreover, the optimum re...

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application...

The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that...

This paper developed an active scanning probe array. The probe array consists of 16×2 probes thermally actuating and sensing. The 32 probes are integrated with Ti/Pt temperature sensors and bimorph thermal actuators. Each probe is a Si3N4 cantilever equipped with a sharp nano scale pyramid tip at its free end. When one of the probes is actuated, its neighboring probes can provide temperature se...

Lattice structures are presented with a piezoelectric sensitivity, d, much larger in magnitude than that of material comprising the lattice ribs. Large sensitivity is achieved by using piezoelectric bimorph elements as ribs; these bend in response to electric input, giving rise to a much larger displacement than for axial elements. Complex electrical connectivity is helpful but not necessary; s...

Multi-stimuli-responsive soft materials introduce a new dimension in the design and control of machines, enhancing their use complex applications. In article number 2100336, Metin Sitti co-workers report bimorph material with uncoupled integration magnetic-responsive elastomer liquid crystal elastomer. This enables heterogeneous properties local addressability for independent separate parts wit...