We adjust the transient dynamics of a piezoactuated bimorph atomic force microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced ...

Piezoelectric loudspeaker is characterized by its very simple constructions, but their radiation performance at low frequency region is poor because their conventional diaphragm is too stiff for large amplitude vibration. This paper proposes three innovative methods for improvement of low frequency radiation performance of piezoelectric direct-radiator loudspeakers by new constructions and mate...

Calibration experiments with a bimorph mirror are presented. Phase-diversity wave-front sensing is used for measuring the control matrix, nulling wave-front errors in the optical setup, including the mirror, and measuring Strehl ratios and residual higher-order aberrations. The Strehl ratio of the calibrated system is measured to be 0.975, corresponding to 1/40 wave rms in the residual wave fro...

A multi-state latching translation stage is demonstrated using microelectromechanical systems technology. The mechanism is fabricated in bonded silicon-on-insulator material with an 85 μm thick bonded layer, by single-layer patterning, deep reactive ion etching, undercutting and metallization. The table position can be continuously adjusted by electrothermal buckling mode actuators or latched i...

This paper deals with a recently developed actuator based on piezoelectric bimorphs which are useful for ASAC applications. The actuator takes the form of two channels with pairs of bimorphs. Each of the bimorph transducers in the couple is connected separately so that the actuator can act in both moment and force configurations simultaneously. The control algorithm allows the ratio between the...

We analyze coupled flexural vibration of two elastically and electrically connected piezoelectric beams near resonance for converting mechanical vibration energy to electrical energy. Each beam is a so-called piezoelectric bimorph with two layers of piezoelectrics. The 1D equations for bending of piezoelectric beams are used for a theoretical analysis. An exact analytical solution to the beam e...

Thermal bimorphs are a popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Their operating principle is based on differential thermal expansion induced by Joule heating. Thermal bimorphs, and other thermal flexture actuators have been used in many applications, from microgrippers, to micro-optical mirrors. In most cases openloop control is used due to difficulties in fabric...

We apply robust control techniques to an adaptive optics system including a dynamic model of the deformable mirror. The dynamic model of the mirror is a modification of the usual plate equation. We propose also a state-space approach to model the turbulent phase. A continuous time control of our model is suggested, taking into account the frequential behavior of the turbulent phase. An H(infini...

Microelectromechanical system (MEMS) technology promises to improve performance of future spacecraft components while reducing mass, cost, and manufacture time. Arrays of microcilia actuators offer a lightweight alternative to conventional docking systems for miniature satellites. Instead of mechanical guiding structures, such a system uses a surface tiled with MEMS actuators to guide the satel...

Segmented myriapod-like bodies may offer performance benefits over more common fixed body morphologies for ambulation. Here, the design of a segmented ambulatory microrobot with a flexible backbone is presented. A dynamic model describing the motion of the microrobot is used to determine body parameters. A three-segment microrobot was fabricated using the Smart Composite Microstructures process...