نتایج جستجو برای: Coupled Plasma Reactor
تعداد نتایج: 571254 فیلتر نتایج به سال:
Numerical Modeling of Non-equilibrium Plasma Discharge of Hydrogenated Silicon Nitride (SiH4/NH3/H2)
In this work, we model a radiofrequency discharge of hydrogenated silicon nitride in a capacitive coupled plasma reactor using Maxwellian and non-Maxwellian electron energy distribution function. The purpose is to investigate whether there is a real advantage and a significant contribution using non-Maxwellian electron energy distribution function rather than Maxwellian one for determining the ...
in this paper, using a one-dimensional simulation model, the reforming process of sour gas, i.e. ch4, co2, and h2s, to the various charged particles and syngas in a dielectric barrier discharge (dbd) reactor is studied. an electric field is applied across the reactor radius, and thus a non-thermal plasma discharge is formed within the reactor. based on the space-time coupled finite element meth...
In this paper, using a one-dimensional simulation model, the reforming process of sour gas, i.e. CH4, CO2, and H2S, to the various charged particles and syngas in a dielectric barrier discharge (DBD) reactor is studied. An electric field is applied across the reactor radius, and thus a non-thermal plasma discharge is formed within the reactor. Based on the space...
A fast two-dimensional (2D) hybrid fluid-analytical transform coupled plasma reactor model was developed using the finite elements simulation tool COMSOL. Both inductive and capacitive coupling of the source coils to the plasma are included in the model, as well as a capacitive bias option for the wafer electrode. A bulk fluid plasma model, which solves the time-dependent plasma fluid equations...
in this research different types of al2o3 were used as supports to prepare catalysts for dehydrogenation of isobutane to isobutene. these supports were al2o3 from merck, axen and gamma al2o3 synthesized from al(oh)3. sn/pt/al2o3 catalysts were prepared by sequential impregnation, at first pt and then sn was deposited. characterization of catalysts was performed by x-ray powder diffraction (xrd)...
Past experiments have demonstrated that details of the external electrical circuitry can strongly influence the performance of radio frequency ~rf! plasma processing reactors. Seemingly minor changes in the circuit, such as changing cable lengths, can lead to significantly different plasma characteristics. To investigate these couplings, a plasma equipment model has been developed which consist...
In this research different types of Al2O3 were used as supports to prepare catalysts for dehydrogenation of isobutane to isobutene. These supports were Al2O3 from Merck, Axen and gamma Al2O3 synthesized from Al(OH)3. Sn/Pt/Al2O3 catalysts were prepared by sequential impregnation, at first Pt and then Sn was deposited. Characterization of catalysts was performed by X-ray powder diffraction (XRD)...
A self-consistent electromagnetic eld model and a uid plasma model have been developed for a microwave plasma reactor used for diamond chemical vapor deposition. The coupled numerical models simulate the electromagnetic excitation of the hydrogen discharge and the hydrogen plasma discharge characteristics. The time-varying electric and magnetic elds inside the reactor, both inside and outside t...
cobalt is one of the most important constituent present in ceramic industries. glazers are the relevant workers when they are producing blue colored ceramic, causing occupational exposure to such metal. through this study, urinary cobalt was determined in glazers in a ceramic industry when they were producing blue-colored ceramic glazes.in this case-control study, spot urine samples were collec...
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