The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearizatio...

An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied ...

gyroscopes are used as rotation rate sensors. conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. micro-gyroscopes have solved these problems due to their small size. the beam micro-gyroscope is one of the popular types of inertial sensors. their small dimensions and low energy consumption are key reasons for their popul...

In this paper we present a mathematical model for the dynamics of an electrostatically actuated micro-cantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular illustrate that...

We present a variant of the model introduced by Vogel and Yang [J. Opt. Soc. Am. A23, 1074 (2006)] for point-actuated deformable mirrors (DMs) with continuous facesheets, and we describe a robust efficient regularized- output least-squares computational scheme to estimate the parameters in the model, given noisy discrete observations of the DM response to known actuation. We demonstrate the eff...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

We study the existence and stability of periodic solutions of a canonical mass-spring model of electrostatically actuated micro-electro-mechanical system (MEMS) by means of classical topological techniques like a-priori bounds, Leray-Schauder degree and topological index. A saddle-node bifurcation is revealed, in analogy with the autonomous case.