this paper presents a comprehensive case study on electro-mechanical analysis of mems[1] variable capacitors. using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. the analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. a complete set of equations defining dynamic behavior of ...

This article presents a phased array antenna employing MEMS phase shifter. The proposed phased array antenna consists of eight square patch antennas operating at 10.4 GHz with a bandwidth of 400 MHz. Feed line for each patch passes through a MEMS phase shifter realized by a series of bridges above the transmission line. The distance between the bridge and the transmission line underneath it is ...

In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Microelectromechanical systems (MEMS) are one such technology that the Army and DOD will rely on heavily to achieve these objectives. The MEMS devices within these systems will be required to last as long as the lifetime of the w...

In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs) based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i) bridge-type RF-MEMS on top of complementary split ring resonators CSRRs; (ii) cantilever-type RF-MEMS on top of SRRs; and (iii) cantilever-type RF-MEMS integrated w...