Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations...

The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of ...

A concept for the fabrication of modular micro sensors on flexible substrate materials is presented in this paper. This paper describes the development and fabrication of modular eddy current micro sensors on a 7 μm thick polymer layer. The modular eddy current micro sensors are fabricated on a standard Si wafer due to handling purposes during the sensor fabrication process. Initial investigati...

In a two-photon femtosecond laser system of three-dimensional micro-fabrication, a model of micro-device is fabricated layer by layer along its contours of cross-sections. So it is necessary to generate cutting path. In this paper, we present an efficient algorithm to generate cutting path which is a series of ordered contour points on each cross-section of a model. Keyword. Micro-fabrication, ...

The design and fabrication of a piezoelectric micro actuator on a silicon diaphragm is presented for application of micro ink jet. We developed the micro devices for the fluid transference that are fabricated using thick film technologies for ceramic materials and Si micro-machining. The performance of drop ejection was shown from the optimal design parameters. It is closely related to the prec...

A novel process based on the principle of layered photolithography has been proposed and tested for making three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dim...

This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the differe...

Self-propelled micro/nano-devices have been proved as powerful tools in various applications given their capability of both autonomous motion and on-demand task fulfilment. Tubular micro-jets stand out as an important member in the family of self-propelled micro/nano-devices and are widely explored with respect to their fabrication and functionalization. A few methods are currently available fo...

A snap fastener is a deformable device consisting of a pair of mating surfaces that \snap" together during assembly. Because of the simple, linear assembly motion, such latching micro fasteners have a wide range of applications in micro assembly tasks, e.g. for devices with multiple or layered components, or micro opto-mechanical plugs. At the micro scale, conventional types of fasteners like s...

The main objective of this research is to develop a micro and nanogap structure using dry anisotropic etching –Reactive Ion EtchingRIE. Amorphous silicon material is used in the micro and nanogap structure and gold as electrode. The fabrication processes of the micro and nanostructure are based on conventional photolithography, wet etching for the Al pattern and wet etching for a-Si pattern usi...