This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

BACKGROUND A movement among international agencies and policy makers to classify industrial materials by their number content of sub-100-nm particles could have broad implications for the development of sustainable nanotechnologies. OBJECTIVES Here we highlight current particle size metrology challenges faced by the chemical industry due to these emerging number percent content thresholds, pr...

the drawing of frequency-path (f-p) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. in this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including conventional and modified two- and three-longitudinal-mode laser interferometers....

Frequency combs, millions of narrow-linewidth optical modes referenced to an atomic clock, have shown remarkable potential in time/frequency metrology, atomic/molecular spectroscopy and precision LIDARs. Applications have extended to coherent nonlinear Raman spectroscopy of molecules and quantum metrology for entangled atomic qubits. Frequency combs will create novel possibilities in nano-photo...

A novel quantitative nano+micro-tribometer with integrated SPM and optical microscope imaging has been developed to characterize numerous physical and mechanical properties of liquid and solid thin films and coatings, with in-situ monitoring their changes during micro and nano indentation, scratching, reciprocating, rotating and other tribology tests. Both the materials properties and surface t...

The drawing of frequency-path (F-P) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. In this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including ...