An innovative process for the microfabrication of Pd-based membranes (Pd and Pd-Ag) on a <110> silicon wafer is presented. Pd-Ag alloy films containing 23wt% Ag are prepared by a dual-sputtering from pure Pd and Ag targets. In the first step, deep grooves are KOH etched in one side of a <110> oriented silicon wafer, leaving membranes with a thickness of ca. 50 μm. After Pd alloy deposition on t...

In this paper, a process for the microfabrication of a wafer-scale palladium—silver alloy membrane (Pd–Ag) is presented. Pd–Ag alloy films containing 23 wt% Ag were prepared by co-sputtering from pure Pd and Ag targets. The films were deposited on the unetched side of a 110 -oriented silicon wafer in which deep grooves were etched in a concentrated KOH solution, leaving silicon membranes with a...

a palladium composite membrane was prepared via electroless plating technique using organic-inorganic method during activation process. the ceramic support surface was modified by two tio2-boehmite and one γ-alumina layers to avoid pd penetration in support pores. thin and defect-free pd composite membrane was obtained by creating a relative smoothness on the ceramic support and using pd nanopa...

The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), and the results indicate an increase of the grain size from 120 to 250-270 nm and film surface rou...

Dense self-supported Pd-alloy membranes are used to selectively separate hydrogen and hydrogen isotopes. In particular, deuterium (D) and tritium (T) are currently identified as the main elements for the sustainability of the nuclear fusion reaction aimed at carbon free power generation. In the fusion nuclear reactors, a breeding blanket produces the tritium that is extracted and purified befor...

in this study, porcelain bond strength to three different alloys of gold-base, pd-ag and base-metal were compared and the effect of repeated porcelain sintering on bond strength was evaluated. the obtained results showed best bond strength of porcelain with gold-base alloy. pd-ag and base-metal alloys showed less strength respectively. during repeated sintering of porcelain, bond strength has n...

A metal (Ag, Au, Pd, Sn, Bi, In, Co, Al) layer directly deposited onto a liquid-crystalline lipid membrane resulted in different morphologies, ranging from a monolayer of discrete particles to a continuous film, depending on the metal's oxidation tendency.