نتایج جستجو برای: Radio Frequency Magnetron Sputtering

تعداد نتایج: 556003  

2016
E Chudinova

Present paper reports on the results of surface modification of the additively manufactured porous Ti6Al4V scaffolds. Radio frequency (RF) magnetron sputtering was used to modify the surface of the alloy via deposition of the biocompatible hydroxyapatite (HA) coating. The surface morphology, chemical and phase composition of the HA-coated alloy were studied. It was revealed that RF magnetron sp...

2015
Evgeniy Bolbasov Larisa Antonova Vera Matveeva Vadim Novikov Evgeniy Shesterikov Natalia Bogomolova Sergey Tverdohlebov Olga Barbarash Leonid Barbarash

The study is aimed at the assessment of surface modification of bioresorbable polymeric material (polycaprolactone (PLC) by radio-frequency magnetron discharge plasma with hydroxyapatite target sputtering. Plasma surface modification increases its roughness, the surface free energy, hydrophilicity and enhances the growth of PCL crystallites. An increase in plasma exposure times (30, 60, 150 s) ...

2011
Husne Ara Begum Hiroshi Naganuma Mikihiko Oogane Yasuo Ando

The 10 at.% Co-substituted BiFeO₃ films (of thickness 50 nm) were successfully prepared by radio frequency (r.f.) magnetron sputtering on SrTiO₃ (100) substrates with epitaxial relationships of [001](001)Co-BiFeO₃//[001](001)SrTiO₃. In this study, a single phase Co-substituted BiFeO₃ epitaxial film was fabricated by r.f. magnetron sputtering. Sputtering conditions such as Ar, O₂ gas pressure, a...

2014
D. K. Maurya

pH sensors are widely used in chemical and biological applications. Metal oxides-based pH sensors have many attractive features including insolubility, stability, mechanical strength, electrocatalyst and manufacturing technology. Various metal oxide thin films prepared by radio frequency (R.F.) magnetron sputtering have attractive features, including high pH sensitivity, fast response, high res...

2017
Andrei Choukourov Pavel Pleskunov Daniil Nikitin Valerii Titov Artem Shelemin Mykhailo Vaidulych Anna Kuzminova Pavel Solař Jan Hanuš Jaroslav Kousal Ondřej Kylián Danka Slavínská Hynek Biederman

This contribution reviews plasma polymer nanoparticles produced by gas aggregation cluster sources either via plasma polymerization of volatile monomers or via radio frequency (RF) magnetron sputtering of conventional polymers. The formation of hydrocarbon, fluorocarbon, silicon- and nitrogen-containing plasma polymer nanoparticles as well as core@shell nanoparticles based on plasma polymers is...

2015
V. Khomyak I. Shtepliuk Volodymyr Khranovskyy Rositsa Yakimova V.Khomyak I.Shtepliuk V. Khranovskyy R. Yakimova

Structural and optical properties of ZnO1-хSх (0 ≤ x ≤ 1.0) thin films grown onto sapphire substrates (с-Al2O3) at 300 C by radio frequency (rf) magnetron sputtering of ZnS ceramic target are studied. A possibility of purposeful controlling sulfur content and, as consequence, ZnO1-хSх band gap energy via changing the ratio of the partial pressures of argon and oxygen are revealed. Linear depen...

2003
D. J. Christie W. D. Sproul

Reactive co-sputtering is a means to create films of customized or graded index of refraction. This gives the optical coating designer new options, and enables practical realization of new classes of coatings. Two neighboring targets may be sputtered such that material from both targets and reactive gas are incident on the workpiece, depositing a film consisting of a compound. For example, if o...

Journal: :Romanian Journal of Information Science and Technology 2023

Spray pyrolysis technique (SPT) and radio-frequency magnetron sputtering (RF-MS) were used to obtain vanadium oxide (VxOy) layers. The surface morphology was visualized using scanning electron microscopy (SEM) atomic force (AFM). Further, t

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2006

2017
Darius Tytko Pyuck-Pa Choi Dierk Raabe

We report on the oxidation behavior of AlN/CrN multilayers at 900 °C, deposited by radio frequency magnetron sputtering. It is shown that oxidation in this system is controlled by diffusion of Cr towards the surface and formation of Cr2O3. Cr diffusion is found to mainly occur along grain boundaries. Thus, coherent cubic AlN/CrN multilayer regions with coarse columnar grain structures are found...

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