gyroscopes are used as rotation rate sensors. conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. micro-gyroscopes have solved these problems due to their small size. the beam micro-gyroscope is one of the popular types of inertial sensors. their small dimensions and low energy consumption are key reasons for their popul...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

In this paper, the architecture, processing errors analysis and optimization method of a dual-mass silicon micro-gyroscope are presented. The dual-mass silicon micro-gyroscope consists of two identical single mass gyroscopes and a lever mechanism. Driving decoupling springs and sensing decoupling springs are key components to achieve motion decoupling. The processing error analysis indicates th...

The bandwidth characteristics of a tuning fork micro-gyroscope with mechanically coupled sense mode were investigated in this paper to provide some references for mechanical bandwidth design. The concept of sense mode mechanical coupling is introduced first. Theoretical frequency response analyses were then carried out on the mechanical part of the gyroscope. Equations representing the relation...

in this paper, an adaptive neuro fuzzy inference system (anfis) based control is proposed for the tracking of a micro-electro mechanical systems (mems) gyroscope sensor. the anfis is used to train parameters of the controller for tracking a desired trajectory. numerical simulations for a mems gyroscope are looked into to check the effectiveness of the anfis control scheme. it proves that the sy...

This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures...

This paper presents a study of the frequency response and the scale-factor of a tuning fork micro-gyroscope operating at atmospheric pressure in the presence of an interference sense mode by utilizing the approximate transfer function. The optimal demodulation phase (ODP), which is always ignored in vacuum packaged micro-gyroscopes but quite important in gyroscopes operating at atmospheric pres...

This paper presents technology for the suppression of the mechanical coupling errors for an improved decoupled dual-mass micro-gyroscope (DDMG). The improved micro-gyroscope structure decreases the moment arm of the drive decoupled torque, which benefits the suppression of the non-ideal decoupled error. Quadrature correction electrodes are added to eliminate the residual quadrature error. The s...

An electro-conjugate fluid (ECF) is a kind of dielectric fluid that works as a functional/smart fluid generating a powerful jet flow (ECF jet) when subjected to a high d.c. voltage. The authors previously proposed the first liquid rate gyroscope in the world using ECF. The ECF liquid rate gyroscope proposed uses the drift of the ECF jet due to the Coriolis force when an angular motion is applie...

A signal processing technique is presented to improve the angular rate accuracy of Micro-Electro-Mechanical System (MEMS) gyroscope by combining numerous gyroscopes. Based on the conditional correlation between gyroscopes, a dynamic data fusion model is established. Firstly, the gyroscope error model is built through Generalized Autoregressive Conditional Heteroskedasticity (GARCH) process to i...