Energy harvesting is a conventional method to collect the dissipated energy of a system. In this paper, we investigate the optimal location of a piezoelectric element to harvest maximum power concerning different excitation frequencies of a vibrating cantilever beam. The cantilever beam oscillates by a concentrated sinusoidal tip force, and a piezoelectric patch is integrated on the beam to gen...

107106-6464 IJET-IJENS © December 2010 IJENS I J E N S Abstract— Capacitive cantilever-mass micro-machined accelerometers have attracted much interest for properties such as a simple structure and potentially high sensitivity. This paper presents the simulation of a low-g capacitive cantilever-mass micro-machined accelerometer model to gain the desirable magnitude of displacement and capacitanc...

Nanoscale mechanical resonators are highly sensitive devices and, therefore, for application as highly sensitive mass balances, they are potentially superior to micromachined cantilevers. The absolute measurement of nanoscale displacements of such resonators remains a challenge, however, since the optical signal reflected from a cantilever whose dimensions are sub-wavelength is at best very wea...

The aim of this paper is to compare the static deflections and stress results of layered and functionally graded composite beams under static load. In the comparison study, the results obtained for a cantilever beam under point load. The Timoshenko beam and the Euler-Bernoulli beam theories are used in the beam model. The energy based Ritz method is used for the solution of the problem and alge...

Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...

An original approach for mechanical characterization was developed using indentation assisted micro-bending. Aiming at the reliable measurement of elastic modulus multi-scale solids, technique relies on deflection measurements cantilever-type beams modeled within framework foundation. The inference is carried out by postulating inverse problem and solving it via error minimization approach. val...

We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10-9 torr, DC input power of 180W and heating tempe...

Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fabricated by Multi-Users MEMS Process (MUMPs) with a post-processing bulk etching step. Micromachined actuators have potential applications in micromanipulation and nanoposition such as manipulation of scanning tunneling microscope (STM) tips, nanopositioner for nano-assembly, micro/nanorobots and ...

This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes ov...

Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sen...