Micromechanical cantilevers show great potential as highly sensitive biochemical sensors. Cantilever-based sensing involves the transduction of a biomolecular interaction to a measurable mechanical change in the cantilever resulting from induced surface stresses added mass. In surface stress sensing applications, one side of the cantilever beam is rendered sensitive to a specific target molecul...

Micromechanical cantilevers show great potential as highly sensitive biochemical sensors. Cantilever-based sensing involves the transduction of a biomolecular interaction to a measurable mechanical change in the cantilever resulting from induced surface stresses added mass. In surface stress sensing applications, one side of the cantilever beam is rendered sensitive to a specific target molecul...

Micromechanical cantilevers show great potential as highly sensitive biochemical sensors. Cantilever-based sensing involves the transduction of a biomolecular interaction to a measurable mechanical change in the cantilever resulting from induced surface stresses added mass. In surface stress sensing applications, one side of the cantilever beam is rendered sensitive to a specific target molecul...

gyroscopes are used as rotation rate sensors. conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. micro-gyroscopes have solved these problems due to their small size. the beam micro-gyroscope is one of the popular types of inertial sensors. their small dimensions and low energy consumption are key reasons for their popul...

In the present work the pull-in voltage of a micro cracked cantilever beam subjected to nonlinear electrostatic pressure was studied. Two mathematical models were employed for modeling the problem: a lumped mass model and a classical beam model. The effect of crack in the lumped mass model is the reduction of the effective stiffness of the beam and in the beam model; the crack is modeled as a m...

A method for identifying a piecewise-linear approximation to the nonlinear forces acting on a system is presented and demonstrated using response data from a micro cantilever beam. It is based on the Restoring Force Surface (RFS) method by Masri and Caughey, which is very attractive when initially testing a nonlinear system because it does not require the user to postulate a form for the nonlin...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel an...

A new micro-XRF instrument was developed in combination with an atomic force microscope (AFM). A small pinhole of 5 or 10 μm was made on the AFM cantilever. The center of the micro X-ray beam generated by a polycapillary X-ray lens was passed through the pinhole. The present experiment demonstrated that the size of the original X-ray beam of 48 μm produced by the polycapillary lens was reduced ...