In this paper, dynamic behavior of a functionally graded cantilever micro-beam and its pull-in instability, subjected to simultaneous effects of a thermal moment and nonlinear electrostatic pressure, has been studied. It has been assumed that the top surface is made of pure metal and the bottom surface from a metal–ceramic mixture. The ceramic constituent percent of the bottom surface ranges fr...

The D-STATCOM is a shunt connected FACTS device which supplies reactive power to the load to improve the voltage stability of the load busses. The D-STAT COM in multi bus system is capable of reducing the losses and improving the voltage regulation.This work deals with comparison of Push Pull and Voltage Inverter based D-STATCOM for multi bus system. Eight bus system is modeled using the elemen...

In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based devices like accelerometers, switches and others. In this paper, we formulated the problem of a cantilever beam with proof mass at its end and carried out the finite difference solution. we studied the effects of lengt...

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work must be obtained from the Foundation for Sensor and SUMMARY We have demonstrated that wafer-level probing of electrostat...

A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement. The method is applicable to beams oriented either in a plane parallel to or perpendicular to a substrate, but is most suitable for vertically oriented (lateral) beams fabricated with a high aspect ratio process whe...

In this paper, we study the operation of electrostatically actuated electromechanical resonators having fractal electrodes. Using the spring-mass model, we establish the scaling relationships for pull-in instability , voltage dependent resonance frequency 1 , and pull-in voltage , where is the fractal dimension of the electrode, is the air-gap, and are the resonance frequency at zero and applie...

In this paper, a novel neuro-fuzzy based method combined with a feature selection technique is proposed for online dynamic voltage stability status prediction of power system. This technique uses synchronized phasors measured by phasor measurement units (PMUs) in a wide-area measurement system. In order to minimize the number of neuro-fuzzy inputs, training time and complication of neuro-fuzzy ...

The design of released microstructures depends on accurate knowledge of residual stresses and associated elastic constants. The MIT-developed material test procedure, M-Test, uses the variation of pull-in voltage with beam length to extract residual stress and elastic modulus from in-situ test structures. This thesis reports a fully automated computer-microvision procedure that automatically de...