This thesis describes electrostatic actuation techniques and mechanical design features for realizing large planar analog vertical travel in an electrostatically actuated diffractive mid-infrared optical device, which is robust, both to manufacture, and against pull-in during use. This device, called the Polychromator, is fabricated by polysilicon surface-micromachining and consists of many par...

Microrobotics represents an important development in technology that has vast applications, particularly in medical fields. Some challenges with these systems include the method of propulsion, control, and power delivery for the device. Many groups are currently developing magnetically based actuation methods, either to create a pulling drive, oscillatory motion, or a corkscrew motion. These ma...

This article deals with the mechanical analysis of a fixed-fixed nano-beam based on nonlocal elasticity theory. The nano-beam is sandwiched with two piezoelectric layers through it’s upper and lower sides. The electromechanical coupled equations governing the problem are derived based nonlocal theory considering to Euler-Bernoulli beam assumptions and based on the nonlocal piezoelectricity acco...

Electrospray was employed upstream of an electrostatic precipitator (ESP) to enhance the collection efficiency of monodisperse nanometer-sized particles. The electrospray of deionized water produced water droplets with a size range from several tens to several hundreds μm. The visible combined effect of the ESP with the electrospray was found for the collection of particles larger than about 20...

Many industry experts predict that the future of ber optic telecommunications depends on the development of all-optical components for switching of photonic signals from ber to ber throughout the networks. MEMS is a promising technology for providing all-optical switching at high speeds with signi cant cost reductions. This paper reports on the the analysis of two designs for 2-DOF electrostati...

In this paper we present a 3D nonlinear dynamic model which describes the transient mechanical analysis of an ohmic contact RF MEMS switch, using finite element analysis in combination with the finite difference method. The model includes real switch geometry, electrostatic actuation, the two-dimensional non-uniform squeeze-film damping effect, the adherence force, and a nonlinear spring to mod...

In this paper static and dynamic response of nanotweezers composed of two carbon nanotube (CNT) arms are investigated. Taking into account a continuum model and considering the electrostatic actuation as well as the presence of the van der Waals forces, the static nonlinear equations are solved by a step by step linearization and Galerkin projection method. Simulating the closing dynamics of a ...