This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...

Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...

In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...

in this paper, chaotic motion analysis and its control for a non-planar non-linear cantilever beam with axial and lateral parametric excitation in the free end is accomplished. this is a new method for control of chaotic motion of a non-linear planar beam. in this survey, internal resonance of the beam is 2:1 and the initial resonance is in the outside of plane and it is assumed a sub-resonance...

In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumin...

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibra...

Understanding the impact of microstructure on thermo-mechanical behavior oxide nuclear fuels is vital to predicting their performance through multiscale models. Evaluating mechanical properties at sub-grain length scale key developing these In this work, 3D finite element (FE) models were constructed simulate micrometer-scale bending micro-cantilever beams fabricated using porous polycrystallin...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

This paper aims at developing a force-guided microassembly technology with in-situ flexible polyvinylidene fluoride (PVDF) beam force sensing and hybrid force/position control based on an infinite dimensional model of the flexible sensor structure. Besides the designed 1-D PVDF cantilever based microforce sensor, as the soft sensor structure itself is installed at the free end of micromanipulat...