In this paper, the general governing equations of three-dimensional vibrations of an Euler-Bernoulli Beam under influences of system dynamics are derived by the Hamiltonian method. Then two fundamental cases of a cantilever beam and a rotating beam are considered. The conventional methods for vibration suppression debit to expenses and make new problems such as control spillover because they ar...

The vibrational characteristics of a cantilever beam are well known to strongly depend on the fluid in which the beam is immersed. In this paper, we present a detailed theoretical analysis of the frequency response of a cantilever beam, that is immersed in a viscous fluid and excited by an arbitrary driving force. Due to its practical importance in application to the atomic force microscope ~AF...

Microcantilevers are widely used in micro-/nanoscale mechanics studies. The nonlinear response of a cantilever at large deflection is sometimes overlooked. A general study of cantilever beam nonlinearity under a variety of loading conditions was performed with analytical and finite element analyses. Analytical equations for the applied load and the cantilever deflection were obtained. The canti...

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam dampin...

Considerable attention has been devoted to active vibration control using intelligent materials as PZT actuators. This paper presents results on active control schemes for vibration suppression of flexible steel cantilever beam with bonded piezoelectric actuators. The PZT patches are surface bonded near the fixed end of flexible steel cantilever beam. The dynamic model of the flexible steel can...

This paper represents the impact of beam thickness and air gap upon the performance of cantilever MEMS switches having different beam materials (Al, Au metals). A comparative analysis of spring constant, effective mass, pull-in voltage, capacitance of cantilever based MEMS switch has been performed by 3D simulation using COMSOL Multiphysics based on Finite Element Method [FEM]. Different parame...

This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection te...

We report on the demonstration of a high finesse micro-optomechanical system and identify potential applications ranging from optical cooling to weak force detection to massive quantum superpositions. The system consists of a high quality diameter flat dielectric mirror cut from a larger substrate with a focused ion beam and attached to an atomic force microscope cantilever. Cavity ring-down me...

The fabrication and characterization of SiGeC cantilever microcoolers are described. Silicon on insulator (SOI) was used as the substrate, and two layers of 3 μm p-SiGe0.07C0.0075 and 1.14 μm n-SiGe0.07C0.0075 lattice matched to silicon were grown using molecular beam epitaxy. The uni couple cooler was fabricated using conventional integrated circuit (IC) processing, and the cantilever structur...