this article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. the electrostatic actuation was induced by applying ac-dc voltage between the microbeam and electrode plate. in contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. in additio...

This article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. The electrostatic actuation was induced by applying AC-DC voltage between the microbeam and electrode plate. In contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. In additio...

Electrostatically actuated microbeams have been studied by many researchers in the last few years. The aim of this study is to present an improved numerical analysis of the dynamic instability of a cantilever microbeam immersed in an incompressible viscous fluid. The finite element method is used for solving the vibrational equation of the microbeam and the potential functions of the fluids in ...

Free vibration of an axially loaded silicon microbeam in MEMS under electrostatic actuation is studied on the basis a sinusoidal shear deformation theory. Based modified couple stress theory (MCST) and von Kármán geometric nonlinearity, nonlinear finite element formulation derived employed to construct discrete governing equations for microbeam. The deflection at given DC voltage firstly calcul...

In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are ...

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

In this paper, we provide a unified and self-consistent treatment of a functionally graded material (FGM) microbeam with varying thermal conductivity subjected to non-uniform or uniform temperature field. Specifically, it is our objective to determine the effect of the microscopic size of the beam, the electrostatic gap, the temperature field and material property on the pull-in voltage of the ...

Vibrations of a fixed–fixed narrow microbeam electrostatically actuated by applying a voltage difference to it and a parallel rigid conductor are analyzed. For gaps between the two conductors that are comparable to the beam’s thickness, the fundamental frequency of the beam may first increase with increasing applied voltage, before suddenly dropping at the pull-in voltage. Available models fail...

In this paper, a general methodology for the dynamic study of electrostatically actuated droplets is presented. A simplified 1D transient model is developed to investigate the transient response of a droplet to an actuation voltage and to study the effect of geometrical and fluid-thermal properties and electrical parameters on this behavior. First, the general approach for the dynamic droplet m...