MEMS resonators have started replacing the quartz crystals and SAW resonators in RF transceivers because of their inherent advantages like high quality factor, small size, robustness and easy integrability with supporting electronics. The paper presents the developments that have taken place in MEMS resonators. Some of the issues in the design and development of electrostatically transduced MEM...

Integrated circuit packaging and their testing is well advanced because of the maturity of the IC industry, their wide applications, and availability of industrial inhstructure. [ 1,2] This is not true for MEMS with respect to packaging and testing. It is more difficult to adopt standardized MEMS device packaging for wide applications although MEMS use many similar technologies to IC packaging....

1.0 INTRODUCTION Solid-state RF devices are currently utilized in a wide array of application areas, including satellite communications systems, wireless communications systems, automotive radars, and defense applications. Currently, PIN diode or Field Effect Transistor (FET)-based switches are utilized for their high switching speeds, high power handling, low drive voltage, low cost, and techn...

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...

The research product ...............................................................................................................................1
 Deformable mirrors: current state-of-the-art...........................................................................................2
 AO and MEMS DMs: relevance to astronomy and space science......................................................

S.Z. cantilevers are made using a simple one-mask fabrication process with.characterization of a cantilever-type MEMS chemical sensor for detection of chemicals. MEMS has been with the advancement of cantilever-type sensors.sensor. The mechanical structure is a cantilever, having its own resonant frequency. MEMS cantilevers can be as thin as a few nanometers with lengths.Cantilever-based Sensor...

Corresponding author, Email: [email protected] ABSTRACT In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS Computer-aided Design (CAD) and s...

Curriculum development in microelectromechanical systems (MEMS) in the Mechanical Engineering and Applied Mechanics (MEAM) Department at the University of Michigan is presented. A course curriculum structure that integrates both mechanical and electrical engineering courses is proposed for mechanical engineering students. The proposed curriculum starts from undergraduate study and finishes at t...