A novel fast tool servo driven by piezoelectric actuator for precision diamond turning is designed in this paper. To overcome the inherent hysteresis and drift nonlinearity effect of the piezoelectric actuator, a closed-loop control system is established using strain gauge integrated in the actuator for position feedback, which has compact structure and can avoid interference in the machining. ...

The trend to miniaturization cannot be overseen. The use of very small electronic and electro-optical components in a variety of consumer and investment goods is leading to an increasing demand for small-scale servo actuators for micro assembly applications in production equipment. The previous generation of micro gears and micro actuators was not suited to this type of application, because of ...

Piezoelectric bimorphs have been used as a micro-gripper in many applications, but the system might be complex and the response performance might not have been fully characterized. In this study the dynamic characteristics of bending piezoelectric bimorphs actuators were theoretically and experimentally investigated for micro-gripping applications in terms of deflection along the length, transi...