MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

In this paper, the observation technique on the miCTO environments with a real-time virtual reality camera system, whitch is constructed with a dynamic focusing lens and a smart vision sensor using the “depth from focus” criteria, has been discussed In the operation with a microscope, such as the micro-surgery, DNA operation and etc., the small depth of a focus makes bad controllability to actu...

In this paper, a real-time virtual reality camera system for the micro environments has been developed with a dynamic focusing lens and a smart vision sensor using the \depth from focus" criteria. In the operation with a microscope, such as the micro-surgery, DNA operation and etc., the small depth of a focus makes bad controllability to actuate 3D micro objects with actuators. For example, if ...

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-...