Micro-channels are made over the Ag+/Na+ ion-exchanged soda-lime glass surface by interaction of an intense Ar+ laser beam and the silver ions inside the glass matrix. The Ar+ laser beam reduces the Ag+ ions inside the matrix. The Ag+ atoms aggregate into silver nano-clusters around the interaction area, inside the glass matrix. Aggregation of the silver atoms and the thermal effects of the int...

In this paper, dynamic behavior of a functionally graded cantilever micro-beam and its pull-in instability, subjected to simultaneous effects of a thermal moment and nonlinear electrostatic pressure, has been studied. It has been assumed that the top surface is made of pure metal and the bottom surface from a metal–ceramic mixture. The ceramic constituent percent of the bottom surface ranges fr...

The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

In this paper, the flexural free vibrations of three dimensional micro beams are investigated based on strain gradient theory. The most general form of the strain gradient theory which contains five higher-order material constants has been applied to the micro beam to take the small-scale effects into account. Having considered the Euler-Bernoulli beam model, governing equations of motion are w...

In this paper, the size dependent behavior of the gold micro-switches has been studied. This behavior becomes noticeable for a structure when the characteristic size such as thickness or diameter is close to its internal length-scale parameter. The size dependent effect is insignificant for the high ratio of the characteristic size to the length-scale parameter, which is the case of the silicon...

In this article, in reference to the modified couple stress theory and Euler-Bernoulli beam theory, the free lateral vibration response of a micro-beam carrying a moveable attached mass is investigated. This is a decent model for biological and biomedical applications beneficial to the early-stage diagnosis of diseases and malfunctions of human body organs and enzymes. The micro-cantilever beam...

In the present work the pull-in voltage of a micro cracked cantilever beam subjected to nonlinear electrostatic pressure was studied. Two mathematical models were employed for modeling the problem: a lumped mass model and a classical beam model. The effect of crack in the lumped mass model is the reduction of the effective stiffness of the beam and in the beam model; the crack is modeled as a m...

in this article, the bending and free vibration analysis of functionally graded (fg) nanocomposites timoshenko beam model reinforced by single-walled boron nitride nanotube (swbnnt) using micro-mechanical approach embedded in an elastic medium is studied. the modified coupled stress (mcst) and nonlocal elasticity theories are developed to take into account the size-dependent effect. the mechani...

The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearizatio...