This paper describes a MEMS RF switch designed and developed specifically for space communication systems, with a novel geometry and operating mode that overcome the drawbacks of previous devices. To avoid the need for high voltage control, the switch uses electro-thermal rather than electrostatic operation; although this requires higher power consumption during switching, a latching configurat...

Two-dimensional (2-D) microelectromechanical systems (MEMS) optical switches can be constructed by arranging the MEMS-actuated micromirrors as an array. We consider here the switching capability, routing, and optimization of the rectangular array interconnection on which the capability and efficiency of 2-D MEMS switches depend. The switching capability of a rectangular array is proved analytic...

Experimental measurements and modeling predictions were obtained to characterize the electro-mechanical response of two different gold contact radio frequency microelectromechanical system (RF MEMS) switches due to variations in the temperature and applied contact voltage. A three-dimensional surface roughness profile from AFM measurements of the top contact surface of a sample RF MEMS switch w...

RF MEMS capacitive switches capable of orderof-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration leads credence to the mechanical r...

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5◦ us...

MicroElectroMechanical Systems for Radio Frequency applications (i.e. RF-MEMS) show very good performance and characteristics. However, their employment within large-scale commercial applications is still limited by issues related to the reliability of such components. In this work we present the Finite Element Method (FEM) modelling and preliminary experimental results concerning an active res...

RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...