This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which operates at microwave frequencies. The switches are first characterized using a full wave analysis based on finite element method aiming to extract the S-parameters of the switches for different geometrical dimensions. From the S-parameter data base, a scalable lumped circuit model is extracted to...

We propose to create a class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram. We have created rigid links, mechanical couplings, and large-force, large-displacement micromotors. Hollow triangular beams made from rotated microhinged polysilicon plates can withstand axial loads of up t...

An overview of recent progress in the research and development of microelectromechanical devices for use in wireless communication sub-systems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, low loss micromechanical switches, and micro-scale vibrating mechanical resonators with Q’s in the tens of thousands. Specific applicati...

This paper describes the passive Qswitch, based on polymer and organic dye BDN, of a pulsed Nd:YAG laser. Pulses of 27ns duration and peak power of 1.7MW for initial transmission of Q-switch 18.4% 0 T = have been obtained. We have obtained Q-switching efficiency of 77% for train of pulses of 31 and 76.2% 0 T = at the pump energy of 98J. We have also obtained the dependency of laser pulse charac...